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Prof. Sasangan Ramanathan

Dean, Professor

Prof. Sasangan Ramanathan, Dean- Engineering and a Professor in the Department of Chemical Engineering and Materials Science, brings with him over 20 years of international research, management and leadership experience.

Qualification: Ph.D
deanengg@amrita.edu
Ph: 0422-2685502

Bio

Prof. Sasangan Ramanathan, Dean- Engineering and a Professor in the Department of Chemical Engineering and Materials Science, brings with him over 20 years of international research, management and leadership experience. Prof. Sasangan’s focus and dedication is in preparing the next generation graduates for challenges in science, engineering, technology and management. He represents the university’s commitment to excellence in teaching, learning, research and positive contribution to the society. He is a strong believer in an educational process that promotes creativity, innovation and entrepreneurship while providing the students with strong fundamentals. Prof. Sasangan Ramanathan holds a Ph. D. in Chemical Engineering from Clarkson University (USA), has served in various capacities in research and development in the US. Recently, he served as the Chief Technology Officer for a multi-million dollar company in the US in developing cutting edge technology for advanced semiconductor device fabrication.

He is well recognized by leading semiconductor device manufacturers like Samsung, SK Hynix, Fujitsu and Toshiba (to name a few). He has been an active member in defining the semiconductor technology roadmap, driving new product development,Besides an illustrious career in the semiconductor industry, Prof. Sasangan was also involved in developing novel catalytic materials aimed at reducing the emission of ozone depleting toxic gases. In addition to being an active researcher, he joined Amrita with strong leadership skills and management experience, leading strategic business development,managing alliances/collaborations with key industry partners/consortia & universities across the globe. Prof. Sasangan has a strong passion for innovation and creativity.

He has authored/co-authored over 45 publications in international journals  and conferences and holds 12 patents. He also served on the International Technical Advisory committee in the American Vacuum Society’s topical conference on Atomic Layer Deposition. He is also an active participant and member of the advisory committee of topical conferences in Electrochemical Society and American Chemical Society and has chaired a number of international conference sessions.

Education

YEAR DEGREE/PROGRAM INSTITUTION
1995 PhD in Chemical Engineering Clarkson University, Potsdam, NY, USA
1991 Postgraduate Degree Clarkson University, Potsdam, NY, USA
1989 Undergraduate Degree National Institute of Technology, Trichy, India

Work Experience

Year Affiliation
April 2014 – Present Dean, Faculty of Engineering, Amrita Vishwa Vidyapeetham
Professor, Department of Chemical Engineering and Materials Science, School of Engineering, Amrita Vishwa Vidyapeetham
2008 – 2014 Chief Technology Officer, AIXTRON, Inc., Sunnyvale, CA USA
2004 – 2008 Vice President, Business Development & Technology, Genus, Inc. USA
2001 – 2004 Director, Technology, Genus, Inc. USA
1999 – 2001 Manager, Process Development, Novellus Systems, Inc. USA
1995 – 1999 Sr. Process Development Engineer, Quester Technology, Inc. USA
Publications

Journal Article

Year : 2009

Highly Conformal ALD of ZrO2 at Higher Process Temperatures than the Conventinal TEMAZr-Based Process

Authors : Prof. Sasangan Ramanathan, Senzaki, Yoshi; Okuyama, Yoshi; Kim, Gi; Kim, Hae Young; Barelli, Carl; Lindner, Johannes; Karim, Zia;

Publisher : ECS Transactions

Y. Senzaki, Okuyama, Y., Kim, G., Kim, H. Young, Barelli, C., Lindner, J., Karim, Z., and Dr. Sasangan Ramanathan, “Highly Conformal ALD of ZrO2 at Higher Process Temperatures than the Conventinal TEMAZr-Based Process”, ECS Transactions, vol. 25, pp. 201–209, 2009.

Year : 2007

High Performance ALD Reactor for High-k Films Films – Progress in ALD Equipment and Processing

Authors : Prof. Sasangan Ramanathan, Dalton, Jeremie; Kim, Hae Young; Zhang, Zhihong; Seidel, Tom; Karim, Zia;

Publisher : ECS Transactions, The Electrochemical Society

J. Dalton, Kim, H. Young, Zhang, Z., Seidel, T., Karim, Z., and Dr. Sasangan Ramanathan, “High Performance ALD Reactor for High-k Films”, ECS Transactions, vol. 3, pp. 27–36, 2007.

Year : 2006

Advanced Metal Gate Electrode Options Compatible with ALD and AVD® HfSiOx-based Gate Dielectrics

Authors : Prof. Sasangan Ramanathan, Karim, Zia; Biossiere, Olivier; Lohe, Christoph; Zhang, Zhihong; Park, Woong; Manke, Christian; Baumann, Peter K; Dalton, Jeremie; Lindner, Johannes; others

Publisher : The Electrochemical Society

Z. Karim, Biossiere, O., Lohe, C., Zhang, Z., Park, W., Manke, C., Baumann, P. K., Dalton, J., Dr. Sasangan Ramanathan, Lindner, J., and , “Advanced Metal Gate Electrode Options Compatible with ALD and AVD® HfSiOx-based Gate Dielectrics”, ECS Transactions, vol. 3, pp. 363–374, 2006.

Year : 2005

ALD of Hafnium Oxide Thin Films from Tetrakis (ethylmethylamino) Hafnium and Ozone

Authors : Prof. Sasangan Ramanathan, Liu, Xinye;Longdergan, Ana; Srivastava, Anuranjan; Lee, Eddie; Seidel, Thomas E; Barton, Jeffrey T; Pang, Dawen; Gordon, Roy G

Publisher : Journal of The Electrochemical Society, The Electrochemical Society

X. Liu, Dr. Sasangan Ramanathan, Longdergan, A., Srivastava, A., Lee, E., Seidel, T. E., Barton, J. T., Pang, D., and Gordon, R. G., “ALD of Hafnium Oxide Thin Films from Tetrakis (ethylmethylamino) Hafnium and Ozone”, Journal of The Electrochemical Society, vol. 152, pp. G213–G219, 2005.

Year : 2003

Progress and Opportunities in Atomic Layer Deposition

Authors : Prof. Sasangan Ramanathan, Tom Seidel, Londergan, A., Winkler, J., Liu, X.

Tom Seidel, Londergan, A., Winkler, J., Liu, X., and Dr. Sasangan Ramanathan, “Progress and Opportunities in Atomic Layer Deposition”, vol. 46, pp. 67-70, 2003.

Year : 2002

Thermal Stability of (HfO2)x(Al2O3)1−x on Si

Authors : Prof. Sasangan Ramanathan, Yu,H. Y.; Wu,N.; Li,M. F.; Chunxiang Zhu; Byung Jin Cho; Kwong,D.-L.; Tung,C. H.; Pan,J. S.; Chai,J. W.; Wang,W. D.; Chi,D. Z.; Ang,C. H.; Zheng,J. Z.;

Publisher : Applied Physics Letters

H. Y. Yu, Wu, N., Li, M. F., Chunxiang Zhu, Byung Jin Cho, Kwong, D. - L., Tung, C. H., Pan, J. S., Chai, J. W., Wang, W. D., Chi, D. Z., Ang, C. H., Zheng, J. Z., and Dr. Sasangan Ramanathan, “Thermal Stability of (HfO2)x(Al2O3)1−x on Si”, Applied Physics Letters, vol. 81, pp. 3618-3620, 2002.

Year : 2002

EnergyGap and Band Alignment for (HfO2)x(Al2O3)1−x(HfO2)x(Al2O3)1−x on (100) Si

Authors : Prof. Sasangan Ramanathan, M. F. Li H. Y. Yu, Cho, B. Jin, Yeo, C. C., Joo, M. S., Kwong, D. - L., Pan, J. S., Ang, C. H., and Zheng, J. Z

Publisher : Applied Physics Letters

M. F. Li H. Y. Yu, Dr. Sasangan Ramanathan, Cho, B. Jin, Yeo, C. C., Joo, M. S., Kwong, D. - L., Pan, J. S., Ang, C. H., and Zheng, J. Z., “EnergyGap and Band Alignment for (HfO2)x(Al2O3)1−x(HfO2)x(Al2O3)1−x on (100) Si”, Applied Physics Letters , vol. 81, pp. 376-378, 2002.

Year : 2002

Process Optimization in Atomic Layer Deposition of High-K Oxides for Advanced gate Stack Engineering

Authors : Prof. Sasangan Ramanathan, A. Londergan, Rassiga,, Hinzay, R., Winkler, J., Velasco, H., Matthysse, L., Seidel, T. E., Ang, C. H., Yu, H. Y., and Li, M. F.

Publisher : Society for Solid State and Electrochemical Science and Technology

A. Londergan, Dr. Sasangan Ramanathan, Rassiga,, Hinzay, R., Winkler, J., Velasco, H., Matthysse, L., Seidel, T. E., Ang, C. H., Yu, H. Y., and Li, M. F., “Process Optimization in Atomic Layer Deposition of High-k Oxides for Advanced Gate Stack Engineering”, Conference Proceedings, the Society for Solid State and Electrochemical Science and Technology. pp. 163-176, 2002.

Year : 1999

Stresses in Sputtered RuOx Thin Films

Authors : Prof. Sasangan Ramanathan, S.B. Desu; D.P. Vijay ; H.D. Bhatt; S. Tirumala

Publisher : Thin Solid Films

S. B. Desu, Vijay, D. P., Dr. Sasangan Ramanathan, Bhatt, H. D., and Tirumala, S., “Stresses in Sputtered RuOx Thin Films”, Thin Solid Films, vol. 350, pp. 21 - 29, 1999.

Year : 1999

Transition Metal Bimetallic Oxycarbides: Synthesis, Characterization, and Activity Studies

Authors : Prof. Sasangan Ramanathan, S.Ted Oyama; C. Charles Yu;

Publisher : Journal of Catalysis

S. T. Oyama, C. Yu, C., and Dr. Sasangan Ramanathan, “Transition Metal Bimetallic Oxycarbides: Synthesis, Characterization, and Activity Studies”, Journal of Catalysis, vol. 184, pp. 535 - 549, 1999.

Year : 1998

Characterization of Ba0.6Sr0.4TiO3 Thin Films with Mg Additive Fabricated by Metalorganic Decomposition Technique

Authors : Prof. Sasangan Ramanathan, P. C. Joshi ; S. B. Desu; S. Stowell; S. Sengupta

Publisher : Taylor & Francis

P. C. Joshi, Dr. Sasangan Ramanathan, Desu, S. B., Stowell, S., and Sengupta, S., “Characterization of Ba0.6Sr0.4TiO3 Thin Films with Mg Additive Fabricated by Metalorganic Decomposition Technique”, Integrated Ferroelectrics, vol. 19, pp. 141-148, 1998.

Year : 1998

New Catalysts for Hydroprocessing: Bimetallic Oxynitrides MI–MII–O–N (MI, MII=Mo, W, V, Nb, Cr, Mn, and Co): Part I. Synthesis and Characterization

Authors : Prof. Sasangan Ramanathan, C.Charles Yu; S.Ted Oyama

Publisher : Journal of Catalysis

C. C. Yu, Dr. Sasangan Ramanathan, and Oyama, S. T., “New Catalysts for Hydroprocessing: Bimetallic Oxynitrides MI–MII–O–N (MI, MII=Mo, W, V, Nb, Cr, Mn, and Co): Part I. Synthesis and Characterization”, Journal of Catalysis, vol. 173, pp. 1 - 9, 1998.

Year : 1998

New Catalysts for Hydroprocessing: Bimetallic Oxynitrides MI-MII-O-N (MI, MII= Mo, W, V, Nb, Cr, Mn, and Co) Part II: Reactivity Studies

Authors : Prof. Sasangan Ramanathan, Oyama, S. T.; C. C.

Publisher : Journal of Catalysis

Dr. Sasangan Ramanathan, Oyama, S. T., and C., C., “New Catalysts for Hydroprocessing: Bimetallic Oxynitrides MI-MII-O-N (MI, MII= Mo, W, V, Nb, Cr, Mn, and Co) Part II: Reactivity Studies”, Journal of Catalysis, pp. 10-16, 1998.

Year : 1998

Synthesis, Characterization, and Reactivity Studies of Supported Mo2C with Phosphorus Additive

Authors : Prof. Sasangan Ramanathan, B. Dhandapani; C.C. Yu; B. Frühberger; J.G. Chen; S.T. Oyama

Publisher : Journal of Catalysis

B. Dhandapani, Dr. Sasangan Ramanathan, Yu, C. C., Frühberger, B., Chen, J. G., and Oyama, S. T., “Synthesis, Characterization, and Reactivity Studies of Supported Mo2C with Phosphorus Additive”, Journal of Catalysis, vol. 176, pp. 61 - 67, 1998.

Year : 1997

Microstructural and Electrical Characteristics of Rapid Thermally Processed (Ba1—xSrx)TiO3 Thin Films Prepared by Metalorganic Solution Deposition Technique

Authors : Prof. Sasangan Ramanathan, Joshi, P. C. ; Desu, S. B.; Stowell, S.

Publisher : physica status solidi (a)

P. C. Joshi, Dr. Sasangan Ramanathan, Desu, S. B., and Stowell, S., “Microstructural and Electrical Characteristics of Rapid Thermally Processed (Ba1—xSrx)TiO3 Thin Films Prepared by Metalorganic Solution Deposition Technique”, physica status solidi (a), vol. 161, pp. 361-370, 1997.

Year : 1997

SrBi2Ta2O9 Thin Films made by Liquid Source Metal-organic Chemical Vapor Deposition

Authors : Prof. Sasangan Ramanathan, Zhu, Yongfei; Desu, Seshu B.; Tingkai Li; Nagata, Masaya

Publisher : Journal of Materials Research, Cambridge University Press

Y. Zhu, Desu, S. B., Tingkai Li, Dr. Sasangan Ramanathan, and Nagata, M., “SrBi2Ta2O9 Thin Films made by Liquid Source Metal-organic Chemical Vapor Deposition”, Journal of Materials Research, vol. 12, pp. 783–792, 1997.

Year : 1997

Bimetallic Nb−Mo Carbide Hydroprocessing Catalysts:  Synthesis, Characterization, and Activity Studies

Authors : Prof. Sasangan Ramanathan, C. Charles Yu; B. Dhandapani; J. G. Chen; S. Ted Oyama

Publisher : The Journal of Physical Chemistry B

C. C. Yu, Dr. Sasangan Ramanathan, Dhandapani, B., Chen, J. G., and S. Oyama, T., “Bimetallic Nb−Mo Carbide Hydroprocessing Catalysts:  Synthesis, Characterization, and Activity Studies”, The Journal of Physical Chemistry B, vol. 101, pp. 512-518, 1997.

Year : 1995

Synthesis and Reactivity of New Bimetallic Oxynitrides

Authors : Prof. Sasangan Ramanathan, Oyama, S T; Yu, C C

Publisher : Preprints of Papers – American Chemical Society, Division of Fuel Chemsirty

S. T. Oyama, Dr. Sasangan Ramanathan, and Yu, C. C., “Synthesis and Reactivity of New Bimetallic Oxynitrides”, Preprints of Papers – American Chemical Society, Division of Fuel Chemsirty, vol. 998, 1995.

Year : 1995

New Catalysts for Hydroprocessing: Transition Metal Carbides and Nitrides

Authors : Prof. Sasangan Ramanathan, S. T. Oyama

Publisher : The Journal of Physical Chemistry

Dr. Sasangan Ramanathan and Oyama, S. T., “New Catalysts for Hydroprocessing: Transition Metal Carbides and Nitrides”, The Journal of Physical Chemistry, vol. 99, pp. 16365-16372, 1995.

Year : 1994

Structural, Surface, and Catalytic Properties of a New Bimetallic V-Mo Oxynitride Catalyst for Hydrodenitrogenation

Authors : Prof. Sasangan Ramanathan, C. Charles Yu,Fawzy Sherif,S. Ted Oyama

Publisher : The Journal of Physical Chemistry

C. C. Yu, Dr. Sasangan Ramanathan, Sherif, F., and S. Oyama, T., “Structural, Surface, and Catalytic Properties of a New Bimetallic V-Mo Oxynitride Catalyst for Hydrodenitrogenation”, The Journal of Physical Chemistry, vol. 98, pp. 13038-13041, 1994.

Conference Proceedings

Year : 2013

Atomic Layer Deposition of Materials for Alternate Non-Volatile Memory Technologies

Authors : Prof. Sasangan Ramanathan

Publisher : Invited Talk at the 13th Atomic Layer Deposition Conference, American Vacuum Society

Dr. Sasangan Ramanathan, “Atomic Layer Deposition of Materials for Alternate Non-Volatile Memory Technologies”, Invited Talk at the 13th Atomic Layer Deposition Conference, American Vacuum Society. 2013.

Year : 2012

Advances in ALD GST Process and Equipment for sub-20nm PCRAM Devices: Precursor delivery, GST Gapfill and Electrical Characterization

Authors : Prof. Sasangan Ramanathan, Z. Karim, Yang, L., Mack, J., Liu, M., Weber, U., Baumann, P., Lu, B., Czubatyj, W., Hudgens, S.

Publisher : Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology

Z. Karim, Yang, L., Mack, J., Liu, M., Weber, U., Baumann, P., Dr. Sasangan Ramanathan, Lu, B., Czubatyj, W., Hudgens, S., and , “Advances in ALD GST Process and Equipment for sub-20nm PCRAM Devices: Precursor delivery, GST Gapfill and Electrical Characterization”, Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology. The Electrochemical Society, 2012.

Year : 2012

Deposition and Electrical Characterization of ALD GexSbyTez for Future Applications

Authors : Prof. Sasangan Ramanathan, Yang, L., Weber, U., Maumann, P. K., Karim, Z, Lu, B., Czubatyj, W, Hudgens, S., Lowrey, T

Publisher : 12th International Conference on Atomic Layer Deposition, American Vacuum Society

L. Yang, Weber, U., Maumann, P. K., Karim, Z., Dr. Sasangan Ramanathan, Lu, B., Czubatyj, W., Hudgens, S., and Lowrey, T., “Deposition and Electrical Characterization of ALD GexSbyTez for Future Applications”, 12th International Conference on Atomic Layer Deposition, American Vacuum Society. 2012.

Year : 2011

Material and Tool Design Challenges for Taking ALD to High Volume Production Beyond 30nm Node

Authors : Prof. Sasangan Ramanathan, B. Lu, Karim, Z.

Publisher : American Vacuum Society

B. Lu, Karim, Z., and Dr. Sasangan Ramanathan, “Material and Tool Design Challenges for Taking ALD to High Volume Production Beyond 30nm Node”, Symposium on Manufacturing and Technology Section MS2, American Vacuum Society. 2011.

Year : 2011

Atomic Layer Deposition of Smooth Phase Change GexSbyTez Layers on Planar and 3D Structures

Authors : Prof. Sasangan Ramanathan, L. Yang, Weber, U., Baumann, P. K., Mack, J., Karim, Z., Lu, B.

Publisher : American Vacuum Society

L. Yang, Weber, U., Baumann, P. K., Mack, J., Karim, Z., Dr. Sasangan Ramanathan, and Lu, B., “Atomic Layer Deposition of Smooth Phase Change GexSbyTez Layers on Planar and 3D Structures”, International Conference on Atomic Layer Deposition, American Vacuum Society. 2011.

Year : 2010

Void Free Gapfill and Phase Change Memory Device Characterization of GeSbTe Films Deposited Using Atomic Vapor Deposition

Authors : Prof. Sasangan Ramanathan, P. Lehnen, Weber, U., Baumann, P. K., Senzaki, Y., Karim, Z., Dr. Sasangan Ramanathan, Lu, B., Reed, J., Czubatyj, W., Hudgens, S., and Dennison, C.

Publisher : 10th Atomic Layer Deposition Conference, American Vacuum Society

P. Lehnen, Weber, U., Baumann, P. K., Senzaki, Y., Karim, Z., Dr. Sasangan Ramanathan, Lu, B., Reed, J., Czubatyj, W., Hudgens, S., and Dennison, C., “Void Free Gapfill and Phase Change Memory Device Characterization of GeSbTe Films Deposited Using Atomic Vapor Deposition”, 10th Atomic Layer Deposition Conference, American Vacuum Society. 2010.

Year : 2009

Highly Conformal ALD of LaOx and La-based High-k Dielectric Films Using Novel Vaporizer Technology

Authors : Prof. Sasangan Ramanathan, C. Barelli, . Y Kim, H., . Y Kim, G., Senzaki, Y., Okuyama, Y., Mack, J., Lindner, J., Lu, B., Karim, Z.

Publisher : Materials Research Society Spring Meeting

C. Barelli, . Y Kim, H., . Y Kim, G., Senzaki, Y., Okuyama, Y., Mack, J., Lindner, J., Lu, B., Karim, Z., and Dr. Sasangan Ramanathan, “Highly Conformal ALD of LaOx and La-based High-k Dielectric Films Using Novel Vaporizer Technology”, Materials Research Society Spring Meeting. 2009.

Year : 2009

Development of Next Generation High-k Filmss – Challenges and Solutions

Authors : Prof. Sasangan Ramanathan

Publisher : European Materials Research Society Spring Meeting

Dr. Sasangan Ramanathan, “Development of Next Generation High-k Filmss – Challenges and Solutions”, European Materials Research Society Spring Meeting. France, 2009.

Year : 2009

Needs for Next Generation Memory and Enabling Solutions based on Advanced Vaporizer Technology

Authors : Prof. Sasangan Ramanathan, Z. Karim, Senzaki, Y., . Y Kim, G., Barelli, C., Okuyama, Y., Kim, H. Y., Lu, B., Lindner, J.

Publisher : 9th Atomic Layer Deposition Conference, American Vacuum Society

Z. Karim, Senzaki, Y., . Y Kim, G., Barelli, C., Okuyama, Y., Kim, H. Y., Lu, B., Lindner, J., and Dr. Sasangan Ramanathan, “Needs for Next Generation Memory and Enabling Solutions based on Advanced Vaporizer Technology”, 9th Atomic Layer Deposition Conference, American Vacuum Society. 2009.

Year : 2008

Modulating Work Function for pFET with AVD Ru-based and TaN-based Gate Electrodes

Authors : Prof. Sasangan Ramanathan, C. Choi, Ando, T., Karim, Z.

Publisher : 39th IEEE Semiconductor Interface Specialist Conference

C. Choi, Ando, T., Karim, Z., and Dr. Sasangan Ramanathan, “Modulating Work Function for pFET with AVD Ru-based and TaN-based Gate Electrodes”, 39th IEEE Semiconductor Interface Specialist Conference. 2008.

Year : 2008

Atomic Level Solutions for Advanced Microelectronic Applications

Authors : Prof. Sasangan Ramanathan, Y. Senzaki; T. Seidel; J. McCormick; G. Y. Kim; H. Y. Kim; Z. Karim; B. Lu; J. Lindner; H. Silva; M. Daulesberg

Publisher : International Conference on Solid State and Integrated Circuit Technology, ICSICT 2008.

Y. Senzaki, Seidel, T., McCormick, J., Kim, G. Y., Kim, H. Y., Karim, Z., Lu, B., Dr. Sasangan Ramanathan, Lindner, J., Silva, H., and Daulesberg, M., “Atomic Level Solutions for Advanced Microelectronic Applications”, in International Conference on Solid State and Integrated Circuit Technology, ICSICT 2008. , 2008.

Year : 2008

Advances in ALD Equipment for sub-40nm Memory Capacitor Dielectrics: Precursor delivery, Materials and Processes

Authors : Prof. Sasangan Ramanathan, Karim, Zia; Senzaki, Yoshi; Lindner, Johannes; Silva, Hugo; Dauelsberg, Martin

Publisher : ECS Transactions, The Electrochemical Society

Z. Karim, Senzaki, Y., Dr. Sasangan Ramanathan, Lindner, J., Silva, H., and Dauelsberg, M., “Advances in ALD Equipment for sub-40nm Memory Capacitor Dielectrics: Precursor delivery, Materials and Processes”, ECS Transactions, vol. 16, pp. 125–134, 2008.

Year : 2006

Atomic Vapor Deposition for Next Generation of Advanced Semiconductor Devices

Authors : Prof. Sasangan Ramanathan, M. Schumacher; P. K. Baumann; J. Linder; C. Lohe; U. Weber; Z. Karim; A. R. Londergan; T. E. Seidel

Publisher : The Electrochemical Society, Meeting Abstracts

M. Schumacher, Dr. Sasangan Ramanathan, Baumann, P. K., J. Linder, Lohe, C., Weber, U., Karim, Z., Londergan, A. R., and Seidel, T. E., “Atomic Vapor Deposition for Next Generation of Advanced Semiconductor Devices”, The Electrochemical Society, Meeting Abstracts, vol. 12. p. 487, 2006.

Year : 2005

Evaluation of ALD Hafnium Silicate and Improvement of Reliability Characteristics

Authors : Prof. Sasangan Ramanathan, H. J. Lim, Kim, Y. S., Jung, H. S., Han, S. K., Kim, M. J., Lee, J. H., Lee, N. I., Chung, Y., Kim, H. Y., Lee, N. K., Seidel, T. E., and Boleslawski, M.

Publisher : Atomic Layer Deposition Conference

H. J. Lim, Kim, Y. S., Jung, H. S., Han, S. K., Kim, M. J., Lee, J. H., Lee, N. I., Chung, Y., Kim, H. Y., Lee, N. K., Dr. Sasangan Ramanathan, Seidel, T. E., and Boleslawski, M., “Evaluation od ALD Hafnium Silicate and Improvement of Reliability Characteristics”, Atomic Layer Deposition Conference. 2005.

Year : 2004

A High Deposition Rate Process Using Limited Optimized Reaction ALD”, Atomic Layer Deposition Conference

Authors : Prof. Sasangan Ramanathan, Kim G. Y., Srivastava A., D., F., A., L., Z., K., Seidel T. E.

Publisher : Atomic Layer Deposition Conference, American Vacuum Society

Kim G. Y., Srivastava A., Foote D., Londergan A., Karim Z., Seidel T. E., and Dr. Sasangan Ramanathan, “A High Deposition Rate Process Using Limited Optimized Reaction ALD”, Atomic Layer Deposition Conference”, Atomic Layer Deposition Conference, American Vacuum Society. pp. 1308-1311, 2004.

Year : 2004

Atomic Layer Deposition of Aluminum Nitride Thin Films from Trimethyl Aluminum (TMA) and Ammonia

Authors : Prof. Sasangan Ramanathan, X. Liu, Lee, E., and Seidel, T. E.

Publisher : Cambridge Univ Press

X. Liu, Dr. Sasangan Ramanathan, Lee, E., and Seidel, T. E., “Atomic Layer Deposition of Aluminum Nitride Thin Films from Trimethyl Aluminum (TMA) and Ammonia”, MRS Proceedings. Cambridge Univ Press, pp. 11-18, 2004.

Year : 2003

Atomic layer deposition of hafnium oxide thin films from tetrakis (dimethylamino) hafnium (TDMAH) and ozone

Authors : Prof. Sasangan Ramanathan, Liu, Xinye; Seidel, Thomas E

Publisher : Cambridge Univ Press

X. Liu, Dr. Sasangan Ramanathan, and Seidel, T. E., “Atomic layer deposition of hafnium oxide thin films from tetrakis (dimethylamino) hafnium (TDMAH) and ozone”, MRS Proceedings. Cambridge Univ Press, pp. 97-102, 2003.

Year : 2003

PATHWAYS FOR ADVANCED TRANSISTORS USING HAFNIUM–BASED OXIDES BY ATOMIC LAYER DEPOSITION

Authors : Prof. Sasangan Ramanathan, A. R. Londergan, Winkler, J., Seidel, T. E., Gutt, J., Brown, G., and Murto, R. W.

Publisher : Electrochemical Society

A. R. Londergan, Dr. Sasangan Ramanathan, Winkler, J., Seidel, T. E., Gutt, J., Brown, G., and Murto, R. W., “PATHWAYS FOR ADVANCED TRANSISTORS USING HAFNIUM–BASED OXIDES BY ATOMIC LAYER DEPOSITION”, Electrochemical Society. pp. 243-264, 2003.

Year : 2002

Pathways in Competitiveness for Atomic Layer Deposition

Authors : Prof. Sasangan Ramanathan, Tom Seidel; Ana Londergan; Eddie Lee; Adrian Jansz

Publisher : Proceedings of the AVS 3rd International Conference on Microelectronics and Interfaces

Dr. Sasangan Ramanathan, Seidel, T., Londergan, A., Lee, E., and Jansz, A., “Pathways in Competitiveness for Atomic Layer Deposition”, Proceedings of the AVS 3rd International Conference on Microelectronics and Interfaces. pp. 11-14, 2002.

Year : 2002

Mass Production Worthy HfO2-Al2O3 Laminates Capacitor Technology using Hf Liquid Precursor for sub-100 nm DRAMS

Authors : Prof. Sasangan Ramanathan, J. H. Lee, J., K., S., K. Y., S., J. H., Lee, N. I., Kang, H. K., Suh, K. P., Jeong, M. M., Hyun, K., Baik, H. S., Chung, Y. S., Liu, X., Seidel, T. E., Winkler, J., Londergan, A., Kim, H. Y., M., J., and Lee, N. K.

Publisher : Techincal Digest, International Electron Devices Meeting

J. H Lee, Kim J., Kim Y. S., S., J. H., Lee, N. I., Kang, H. K., Suh, K. P., Jeong, M. M., Hyun, K., Baik, H. S., Chung, Y. S., Liu, X., Dr. Sasangan Ramanathan, Seidel, T. E., Winkler, J., Londergan, A., Kim, H. Y., M., J., and Lee, N. K., “Mass Production Worthy HfO2-Al2O3 Laminates Capacitor Technology using Hf Liquid Precursor for sub-100 nm DRAMS”, Techincal Digest, International Electron Devices Meeting. pp. 221-224, 2002.

Year : 1998

Synthesis and Reactivity of Niobium Molybdenum Oxycarbide – A New High Activity Hydroprocessing Catalys

Authors : Prof. Sasangan Ramanathan, S.T.Oyama; V. Schwartz; B. Dhandapani

Publisher : Abstracts of Papers of the American Chemical Society

S.T.Oyama, Dr. Sasangan Ramanathan, Schwartz, V., and Dhandapani, B., “Synthesis and Reactivity of Niobium Molybdenum Oxycarbide – A New High Activity Hydroprocessing Catalys”, Abstracts of Papers of the American Chemical Society, vol. 215. p. U228, 1998.

Book Chapter

Year : 1996

Monograph of the Chemistry of Transition Metal Nitrides and Carbides

Authors : Prof. Sasangan Ramanathan, J. Wang; M. Castonguay; P. H. McBreen; S. T. Oyama

Publisher : Chapman and Hall

J. Wang, Dr. Sasangan Ramanathan, M. Castonguay, McBreen, P. H., and Oyama, S. T., “Monograph of the Chemistry of Transition Metal Nitrides and Carbides”, Chapman and Hall, London, 1996, p. 426.

Year : 1996

Chemisorption of CO and NO on Molybdenum Carbide Foils

Authors : Prof. Sasangan Ramanathan, J. Wang; M. Castonguay; P.H. McBreen

Publisher : Springer

J. Wang, Dr. Sasangan Ramanathan, Castonguay, M., and McBreen, P. H., “Chemisorption of CO and NO on Molybdenum Carbide Foils”, in Book Chapter in The Chemistry of Transition Metal Carbides and Nitrides, Springer, Dordrecht, 1996, pp. 426-438.

Patents

Year : 2015

Method for forming TiSiN thin film layer by using atomic layer deposition

Authors : Prof. Sasangan Ramanathan, W. PARK, Jang, Y. J., Kim, G. Y., Lu, B., Siu, G., Silva H

W. PARK, Jang, Y. J., Kim, G. Y., Lu, B., Siu, G., Silva, H., and Dr. Sasangan Ramanathan, “Method for forming TiSiN thin film layer by using atomic layer deposition”, U.S. Patent US 14/391,2942015.

Year : 2015

Method for Forming TiSiN Thin Film Layer by using Atomic Layer Deposition (Granted)

Authors : Prof. Sasangan Ramanathan, PARK, W.; Jang, Y.J.; Kim, G.Y.; Lu, B.; Siu, G.; Silva, H.;

Publisher : Number 9159608

W. PARK, Jang, Y. J., Kim, G. Y., Lu, B., Siu, G., Silva, H., and Dr. Sasangan Ramanathan, “Method for Forming TiSiN Thin Film Layer by using Atomic Layer Deposition (Granted)”, U.S. Patent 9159608, US 14/391,2942015.

Year : 2011

Transient Enhanced Atomic layer Deposition (Granted)

Authors : Prof. Sasangan Ramanathan, Kim G. Y.; Srivastava A.; Seidel T. E.; Londergan A. R.;

Kim G. Y., Srivastava A., Seidel T. E., Londergan A. R., and Dr. Sasangan Ramanathan, “Transient Enhanced Atomic layer Deposition (Granted)”, U.S. Patent 79814732011.

Year : 2011

Transient Enhanced Atomic layer Deposition

Authors : Prof. Sasangan Ramanathan, Kim G. Y, Srivastava A, Seidel T. E, Londergan A. R

Kim G. Y., Srivastava A., Seidel T. E., Londergan A. R., and Dr. Sasangan Ramanathan, “Transient Enhanced Atomic layer Deposition”, U.S. Patent 79814732011.

Year : 2006

Multi-single Wafer Processing Apparatus

Authors : Prof. Sasangan Ramanathan, Puchacz, J, Reyes, M.,Seidel, T.

J. Puchacz, Dr. Sasangan Ramanathan, Reyes, M., and Seidel, T., “Multi-single Wafer Processing Apparatus”, U.S. Patent US 11/224,7672006.

Year : 2005

Method and Apparatus for Introduction of Solid Precursors and Reactants into Supercritical Fluid Reactor

Authors : Prof. Sasangan Ramanathan, Sanjay Gopinath, Patrick A. Van Cleemput, Michelle Schulberg, Francisco Juarez, Patrick Joyce

Gopinath, S., Van Cleemput, P. A., Schulberg, M., Ramanathan, S., Juarez, F., and Joyce, P., Method and Apparatus for Introduction of Solid Precursors and Reactants into Supercritical Fluid Reactor, US Patent, 6951765, 2005

Year : 2005

Multi-single Wafer Processing Apparatus (Filed)

Authors : Prof. Sasangan Ramanathan, Puchacz, J.; Reyes, M.; Seidel, T.

J. Puchacz, Dr. Sasangan Ramanathan, Reyes, M., and Seidel, T., “Multi-single Wafer Processing Apparatus (Filed)”, U.S. Patent File Number 20060137609, US 11/224,7672005.

Year : 2005

Method for the Formation of Diffusion Barrier (Granted)

Authors : Prof. Sasangan Ramanathan, Lee, S.H.;

Publisher : Number 6887781, US 10/425,306, USA

S. H. Lee and Dr. Sasangan Ramanathan, “Method for the Formation of Diffusion Barrier (Granted)”, U.S. Patent 6887781, US 10/425,3062005.

Year : 2005

Method and Apparatus for Introduction of Solid Precursors and Reactants into a Supercritical Fluid Reactor (Granted)

Authors : Prof. Sasangan Ramanathan, Gopinath, S.; Van Cleemput, P.A.; Schulberg, M. ; Juarez, F.; Joyce, P.

Publisher : Number US Patent

S. Gopinath, Van Cleemput, P. A., Schulberg, M., Dr. Sasangan Ramanathan, Juarez, F., and Joyce, P., “Method and Apparatus for Introduction of Solid Precursors and Reactants into a Supercritical Fluid Reactor (Granted)”, U.S. Patent US Patent, 6951765, US 10/016,0172005.

Year : 2005

Methods and Apparatus for Cycle Time Improvements for Atomic Layer Deposition

Authors : Prof. Sasangan Ramanathan, Liu, X., Seidel, T., Lee, E., Doering, K.

X. Liu, Seidel, T., Lee, E., Doering, K., and Dr. Sasangan Ramanathan, “Methods and Apparatus for Cycle Time Improvements for Atomic Layer Deposition”, 2005.

Year : 2005

Method for the Formation of Diffusion Barrier

Authors : Prof. Sasangan Ramanathan, Lee, S.H.

S. H. Lee and Dr. Sasangan Ramanathan, “Method for the Formation of Diffusion Barrier”, U.S. Patent US 10/425,3062005.

Year : 2005

Method and Apparatus for Introduction of Solid Precursors and Reactants into a Supercritical Fluid Reactor

Authors : Prof. Sasangan Ramanathan, Gopinath, S., Van Cleemput, P.A., Schulberg, M., Juarez, F., Joyce, P.

S. Gopinath, Van Cleemput, P. A., Schulberg, M., Dr. Sasangan Ramanathan, Juarez, F., and Joyce, P., “Method and Apparatus for Introduction of Solid Precursors and Reactants into a Supercritical Fluid Reactor”, U.S. Patent US 10/016,0172005.

Year : 2004

Methods and Apparatus for Cycle Time Improvements for Atomic Layer Deposition (Filed)

Authors : Prof. Sasangan Ramanathan, Doering, K., Lee, E., Seidel, T., Liu, X.

X. Liu, Seidel, T., Lee, E., Doering, K., and Dr. Sasangan Ramanathan, “Methods and Apparatus for Cycle Time Improvements for Atomic Layer Deposition (Filed)”, U.S. Patent File Number 20050016956, 2004.

Year : 2004

Passivation Method for Improved Uniformity and Repeatability for Atomic Layer Deposition and Chemical Vapor Deposition (Granted)

Authors : Prof. Sasangan Ramanathan, Londergan, A.R. ; Winkler, J.; Seidel, T.E.

A. R. Londergan, Dr. Sasangan Ramanathan, Winkler, J., and Seidel, T. E., “Passivation Method for Improved Uniformity and Repeatability for Atomic Layer Deposition and Chemical Vapor Deposition (Granted)”, U.S. Patent 6720259, US 10/262,9922004.

Year : 2004

Passivation Method for Improved Uniformity and Repeatability for Atomic Layer Deposition and Chemical Vapor Deposition

Authors : Prof. Sasangan Ramanathan, Londergan, A.R., Winkler, J., Seidel, T.E.

A. R. Londergan, Dr. Sasangan Ramanathan, Winkler, J., and Seidel, T. E., “Passivation Method for Improved Uniformity and Repeatability for Atomic Layer Deposition and Chemical Vapor Deposition”, U.S. Patent US 10/262,9922004.

Year : 2003

Formation of Metal Derived Layers by Simultaneous Deposition and Evaporation of Metals

Authors : Prof. Sasangan Ramanathan, Jeremie Dalton, Ronald A. Powell, Sridhar K. Kailasam

Dalton, J., Powell, R. A., Kailasam, S. K., and Ramanathan, S., Formation of Metal Derived Layers by Simultaneous Deposition and Evaporation of Metals, US Patent, 6589887, 2003

Year : 2003

Formation of Metal-derived Layers by Simultaneous Deposition and Evaporation of Metal (Granted)

Authors : Prof. Sasangan Ramanathan, Dalton, J.; Powell, R.A.; Kailasam, S.K.;

J. Dalton, Powell, R. A., Kailasam, S. K., and Dr. Sasangan Ramanathan, “Formation of Metal-derived Layers by Simultaneous Deposition and Evaporation of Metal (Granted)”, U.S. Patent 65898872003.

Year : 2003

Forming Metal-derived Layers by Simultaneous Deposition and Evaporation of Metal

Authors : Prof. Sasangan Ramanathan, Dalton, J., Powell, R.A., Kailasam, S.K.

J. Dalton, Powell, R. A., Kailasam, S. K., and Dr. Sasangan Ramanathan, “Forming Metal-derived Layers by Simultaneous Deposition and Evaporation of Metal”, U.S. Patent US 09/975,6122003.

Year : 2000

Ferroelectric Thin Film Composites made by Metalorganic Decomposition (Granted)

Authors : Prof. Sasangan Ramanathan, Sengupta, S.; Stowell, S.; Sengupta, L.; Joshi, P.C.; Desu, S.B.

S. Sengupta, Stowell, S., Sengupta, L., Joshi, P. C., Dr. Sasangan Ramanathan, and Desu, S. B., “Ferroelectric Thin Film Composites made by Metalorganic Decomposition (Granted)”, U.S. Patent US Patent, 60715552000.






Year : 2000

Surface Modification of Semiconductors using Electromagnetic Radiation (Granted)

Authors : Prof. Sasangan Ramanathan, Khan A.; Foggiato G. A.

Dr. Sasangan Ramanathan, Khan A., and Foggiato G. A., “Surface Modification of Semiconductors using Electromagnetic Radiation (Granted)”, U.S. Patent 60157592000.

Year : 2000

Surface Modification of Semiconductors using Electromagnetic Radiation

Authors : Prof. Sasangan Ramanathan, Khan A., Foggiato G. A.

Dr. Sasangan Ramanathan, A., K., and A., F. G., “Surface Modification of Semiconductors using Electromagnetic Radiation”, U.S. Patent 60157592000.

Year : 2000

Ferroelectric Thin Film Composites made by Metalorganic Decomposition

Authors : Prof. Sasangan Ramanathan, Sengupta, S.; Stowell, S.; Sengupta, L.; Joshi, P.C.; Desu, S.B.

S. Sengupta, Stowell, S., Sengupta, L., Joshi, P. C., Dr. Sasangan Ramanathan, and Desu, S. B., “Ferroelectric Thin Film Composites made by Metalorganic Decomposition (Granted)”, U.S. Patent US Patent, 60715552000.

Year : 1999

Flash Evaporator (Granted)

Authors : Prof. Sasangan Ramanathan, Desu S. B.; Suchicital C.A.

Publisher : USA

Dr. Sasangan Ramanathan, Desu S. B., and Suchicital C.A., “Flash Evaporator (Granted)”, 1999.

Year : 1999

Flash Evaporator

Authors : Prof. Sasangan Ramanathan, Desu S. B., Suchicital C.A.

Dr. Sasangan Ramanathan, B., D. S., and C.A., S., “Flash Evaporator”, 1999.

Patents Granted
Sponsored Projects
Project Year (Duration) Funding Organization Amount
2016-2021 Visvesvaraya Funds ₹ 28,800,000
2016-2019 UNICEF ₹ 7,400,000
2018 DST-FIST ₹ 26,500,000
2018-2020 LAM Research (USA) ₹ 2,340,000
2018-2020 Department of Social Defense ₹ 3,600,000
2019-2021 LAM Research (USA) ₹ 4,680,000
2019-2022 Hindustan Petroleum Corporation Limited ₹ 5,800,000
2019-2023 DRDO-CAIR ₹ 7,200,000
2019-2021 Department of Social Defense ₹ 3,600,000
TOTAL ₹ 89,920,000
Research

Research & Management Experience

  • Has been a significant contributor in defining the technology roadmap for semiconductor capital equipment manufacturers, specifically thin film deposition equipment
  • Demonstrated leadership in product development with special focus in transferring technology & concepts to products
  • Possesses strong fundamental understanding of various thin film deposition techniques – physical vapour deposition, chemical vapour deposition and atomic layer deposition
  • Has initiated and led several industry and academic collaborations to promote advanced semiconductor chip manufacturing
  • Been a significant contributor in various managerial roles spanning from technology and business development, strategic business planning, merger & acquisition and industry-academia partnership
  • Besides the contribution in semiconductor chip manufacturing expert, an excellent materials scientist with significant contribution in developing novel catalyst for shale oil refining, which has led to a boom in the shale oil refining in the US

Major Research Interests

  • Deposition and characterization of materials for advanced CMOS process technology (14nm and beyond)
  • Surface Science and Catalysis
  • Advanced deposition technologies such as Atomic Layer Deposition to “tailor the material properties” for various applications
Membership

Membership in Professional Bodies

  1. American Vacuum Society
  2. American Chemical Society
  3. Electrochemical Society
Student Guidance

Doctoral Students

  1. “Development of Ulta High Temperature Resistance Polymeric Nanocomposites for Long Distance Space Applications”(Mr.P.Mohankumar)-Ongoing – Co-Supervisor
  2. “Development of Metal/Poly Ether Ether Ketone Hybrid Composite Laminates for Nuclear Waste Storage Containers” (Mr. Manu Remanan)-Ongoing– Co-Supervisor
Admissions Apply Now