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Characteristics of TaN gate MOSFET with ultrathin hafnium oxide (8/spl Aring/-12/spl Aring/)

Authors : Lee, Byoung Hun, Choi, Rino, Kang, Laegu, Dr. Sundararaman Gopalan, Nieh, Renee, Onishi, Katsunori, Jeon, Y, Qi, Wen-Jie, Kang, C, Lee, JC

Publisher :Electron Devices Meeting, 2000. IEDM'00. Technical Digest. International, IEEE

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