Publication Type : Journal Article
Source : Volume 46, Number 5, p.67-70 (2003)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2003
Abstract :
Cite this Research Publication : Tom Seidel, Londergan, A., Winkler, J., Liu, X., and Dr. Sasangan Ramanathan, “Progress and Opportunities in Atomic Layer Deposition”, vol. 46, pp. 67-70, 2003.