Publication Type : Conference Paper
Publisher : Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability Issues: Proceedings of the Fifth International Symposium, The Electrochemical Society
Source : Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability Issues: Proceedings of the Fifth International Symposium, The Electrochemical Society (2000)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2000
Abstract :
Cite this Research Publication : R. Nieh, Qi, W. - J., Lee, B. Hun, Kang, L., Jeon, Y., Onishi, K., Dr. Sundararaman Gopalan, Kang, C. Seok, Dharmarajan, E., Choi, R., and , “PROCESSING EFFECTS AND ELECTRICAL EVALUATION OF Z1O2 FORMED BY RTP OXIDATION OF Zr”, in Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability Issues: Proceedings of the Fifth International Symposium, 2000.