Publication Type : Conference Proceedings
Publisher : American Vacuum Society
Source : Symposium on Manufacturing and Technology Section MS2, American Vacuum Society (2011)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2011
Abstract :
Cite this Research Publication : B. Lu, Karim, Z., and Dr. Sasangan Ramanathan, “Material and Tool Design Challenges for Taking ALD to High Volume Production Beyond 30nm Node”, Symposium on Manufacturing and Technology Section MS2, American Vacuum Society. 2011.