Publication Type : Journal Article
Publisher : J. Applied Physics
Source : J. Applied Physics, Volume 94, Number 8, p.5252–5260 (2003)
Campus : Coimbatore
School : School of Engineering
Department : Electronics and Communication
Year : 2003
Abstract :
Cite this Research Publication : Dr. T. Rajagopalan, Wang, X., Lahlouh, B., Ramkumar, C., Dutta, P. S., and Gangopadhyay, S., “Low temperature deposition of nanocrystalline SiC films by PECVD and their structural and optical characterization”, J. Applied Physics, vol. 94, pp. 5252–5260, 2003.