Publication Type : Conference Paper
Publisher : 60th DRC. Conference Digest
Source : Device Research Conference, 2002. 60th DRC. Conference Digest (2002)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2002
Abstract :
Cite this Research Publication : C. S Gopalan, Onishi, R., Nieh, K., Kang, R., Cho, C. S., Krishnan, H. - J., and Lee, J. C. S., “Impact of NH3 pre-treatment on the electrical and reliability characteristics of ultra thin hafnium silicate films prepared by re-oxidation method”, 2002.