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Experimental study of etched back thermal oxide for optimization of the Si/high-k interface

Publication Type : Conference Paper

Publisher : 2004 Spring Meeting of the Material Research Society

Source : 2004 Spring Meeting of the Material Research Society (2004)

Campus : Amritapuri

School : School of Engineering

Department : Electronics and Communication

Year : 2004

Abstract :

Cite this Research Publication : J. Barnett, Moumen, N., Gutt, J., Gardner, M., Huffman, C., Majhi, P., Peterson, J. J., Dr. Sundararaman Gopalan, Foran, B., Li, H. J., and , “Experimental study of etched back thermal oxide for optimization of the Si/high-k interface”, in 2004 Spring Meeting of the Material Research Society, 2004.


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