Publication Type : Conference Proceedings
Publisher : Atomic Layer Deposition Conference
Source : Atomic Layer Deposition Conference (2005)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Verified : Yes
Year : 2005
Abstract :
Cite this Research Publication : H. J. Lim, Kim, Y. S., Jung, H. S., Han, S. K., Kim, M. J., Lee, J. H., Lee, N. I., Chung, Y., Kim, H. Y., Lee, N. K., Dr. Sasangan Ramanathan, Seidel, T. E., and Boleslawski, M., “Evaluation od ALD Hafnium Silicate and Improvement of Reliability Characteristics”, Atomic Layer Deposition Conference. 2005.