Publication Type : Conference Proceedings
Publisher : Proceedings of the 11th International Symposium on Integrated Ferroelectrics, Colorado Springs
Source : Proceedings of the 11th International Symposium on Integrated Ferroelectrics, Colorado Springs (1999)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 1999
Abstract :
Cite this Research Publication :
Dr. Sundararaman Gopalan, Han, J. H., Balu, V., Lee, J. H., Mohemmedali, R., Wong, C. H., and Lee, J. C., “Effect of N2O on the RF-magnetron Sputtered SrTiO3 Films for ULSI DRAM Application”, Proceedings of the 11th International Symposium on Integrated Ferroelectrics. Colorado Springs, 1999.