Micromachining – definition – principle of mechanical micromachining – Classification of micromachining and nanofinishing processes – Molecular dynamics simulations of machining at atomic scale.
Diamond Turn Machining (DTM) – components of DTM – requirements of DTM – material removal mechanism – molecular dynamics – tool geometry. Abrasive Jet Micromachining – erosion mechanism – powder feeding – microstructure fabrication. Ultrasonic micromachining – basic elements – mechanism of material removal – micro-hole drilling, contour machining, micro-de-burring, machining of ceramic materials. Electrochemical micromachining.