Unit 1

Working Principles Of Microsystems Microsensors: Acoustic, Biological, Chemical, Optical, Pressure, Thermal; Microactuations Using Thermal Force, Shape Memory Alloy, Piezoelectric Crystals, Electrostatic Forces; MEMS With Microactuators: Micrograppers, Micromotors, Microvalves, Micropumps; Microaccelerometer.

Unit 2

Engineering Mechanics for Microsystem Design Static Bending Of Thin Plates: Bending Of Circular Plates-Rectangular Plates-Square Plates With Edge Fixed; Mechanical Vibrations: Resonant, Microaccelerometer, Design Theory Of Accelerometer, Resonant Microsensor; Thermomechanics: Thermal Effects On Mechanical Strength Of Materials, Creep Deformation, Thermal Stress; Fracture Mechanics: Stress Intensity Factors, Fracture Toughness, Interfacial Fracture Mechanics; Thin Film Mechanics.

Unit 3

Microsystems Design Considerations: Constraint, Selection Of Materials, Manufacturing Processes, Signal Transduction, Electromechanical System; Process Design: Photolithography, Thin Film Fabrication, Geometry Shaping; Mechanical Designing: Thermomechanical Loading, Stress Analysis, Dynamic Analysis, Fracture Analysis.

Unit 4

Biomems Applications Overall Market Of Micromachines, MEMS In Biotechnology Market, Micro-TAS And LOC In Sample Preparation For Molecular Diagnostics.

Course Objectives:

1. To Make Students Understand the Basic Concepts Of MEMS.
2. To Create Problem Solving Ability Among Students for Developing Biological MEMS Design.
3. To Encourage Students for Designing Biomems Solutions for Existing Healthcare Solutions.
4. To Prepare Students for Entrepreneurship in Biomems Product And Services.

Course Outcomes:

After completing this course, students should be able to

• CO1: Analyze and apply microsensors for diverse applications, including acoustic, biological, and chemical sensing.
• CO2: Design and analyze various MEMS microactuators, including grippers, motors, valves, pumps, and accelerometers.
• CO3: Apply engineering mechanics principles to analyze static bending, mechanical vibrations, thermomechanics, and fracture mechanics in microsystems.
• CO4: Demonstrate proficiency in designing microsystems considering material selection, manufacturing processes, signal transduction, and electromechanical systems.
• CO5: Evaluate and apply BioMEMS in diverse applications, understanding their role in the micromachines market, biotechnology, and molecular diagnostics.

CO-PO Mapping

1. Hsu, T. R. MEMS and Microsystems: Design and Manufacture, McGraw Hill, 2002.
2. Madou, M. J., Fundamentals of microfabrication and nanotechnology, three-volume set. CRC Press, 2018.