Publication Type : Conference Paper
Publisher : 2004 Spring Meeting of the Material Research Society
Source : 2004 Spring Meeting of the Material Research Society (2004)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2004
Abstract :
Cite this Research Publication : J. Barnett, Moumen, N., Gutt, J., Gardner, M., Huffman, C., Majhi, P., Peterson, J. J., Dr. Sundararaman Gopalan, Foran, B., Li, H. J., and , “Experimental study of etched back thermal oxide for optimization of the Si/high-k interface”, in 2004 Spring Meeting of the Material Research Society, 2004.