Publication Type : Conference Proceedings
Publisher : Materials Research Society Spring Meeting
Source : Materials Research Society Spring Meeting. 2009.
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2009
Abstract :
Cite this Research Publication : C. Barelli, . Y Kim, H., . Y Kim, G., Senzaki, Y., Okuyama, Y., Mack, J., Lindner, J., Lu, B., Karim, Z., and Dr. Sasangan Ramanathan, “Highly Conformal ALD of LaOx and La-based High-k Dielectric Films Using Novel Vaporizer Technology”, Materials Research Society Spring Meeting. 2009.