Publication Type : Journal Article
Publisher : Society for Solid State and Electrochemical Science and Technology
Source : Conference Proceedings, the Society for Solid State and Electrochemical Science and Technology, p.163-176 (2002)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2002
Abstract :
Cite this Research Publication : A. Londergan, Dr. Sasangan Ramanathan, Rassiga,, Hinzay, R., Winkler, J., Velasco, H., Matthysse, L., Seidel, T. E., Ang, C. H., Yu, H. Y., and Li, M. F., “Process Optimization in Atomic Layer Deposition of High-k Oxides for Advanced Gate Stack Engineering”, Conference Proceedings, the Society for Solid State and Electrochemical Science and Technology. pp. 163-176, 2002.