Publication Type : Conference Paper
Publisher : VLSI Technology, 2002. Digest of Technical Papers. 2002 Symposium on, IEEE
Source : VLSI Technology, 2002. Digest of Technical Papers. 2002 Symposium on, IEEE (2002)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2002
Abstract :
Cite this Research Publication :
K. Onishi, Kang, C. Seok, Choi, R., Cho, H. - J., Dr. Sundararaman Gopalan, Nieh, R., Krishnan, S., and Lee, J. C., “Effects of high-temperature forming gas anneal on HfO/sub 2/MOSFET performance”, in VLSI Technology, 2002. Digest of Technical Papers. 2002 Symposium on, 2002.