Unit 1

Preparation Methods
Learning Objectives
Understand about the various physical and chemical deposition metods

Physical methods: Thermal evaporation, Cathodic sputtering, Molecular beam epitaxy and Laser ablation methods.
Chemical methods: Electrolytic deposition, Chemical vapor deposition.

Unit 2

Thickness Measurement and Characterization
Learning Objectives
Understand the principle in measuring the thickness of thin films and to find a suitable method for measuring the thickness of thin films.
Understand and analyze the characteristics of thin films using different instrumentation technique.

Electrical, Mechanical, Optical, Microbalance, Quartz crystal methods.
Analytical techniques of characterization: X-ray diffraction, Electron microscopy, High and low energy electron diffraction, Auger emission spectroscopy.

Unit 3

Growth and Structure of Films
Learning Objectives
Able to understand the nucleation theories leading to the growth.
Able to understand different types of growth mechanisms in the growth of thin films
Understand, analyze and treating the Structural defects in thin films.
General Features, Nucleation theories, Effect of electron bombardment on film structure, Post-nucleation growth, Epitaxial film growth, Structural defects.

Unit 4

Properties of Thin Films
Learning Objectives
Understanding the mechanical behavior of thin films.
Understanding and calculating the optical constants of thin films and hence draw the conclusions regarding the optical behavior of thin films.
Understanding he electrical and superconducting behavior of thin films and hence to draw a valuable conclusion regarding the properties of the material

Mechanical properties: Elastic and Plastic behavior.
Optical properties: Reflectance and transmittance spectra, Absorbing films, Optical constants of film material, Multilayer films, Anisotropic and isotropic films.
Electrical properties: Conductivity in metal, Semiconductor and Insulating films, Discontinuous films, Superconducting films.

Unit 5

Magnetic Properties of Thin Films and Thin Film Devices
Learning Objectives
Understanding the theories of magnetism and the application of magnetic thin films in various fields.
Understanding the working principle of thin film devices and the fabrication and application of thin film devices.

Molecular field theory, Spin wave theory, Anisotropy in magnetic thin films, Domains in thin films, Applications of magnetic thin films.
Thin film devices: Fabrication and applications.

Prerequisite: Solid State Physics

Course Objectives: To make the students to understand about the difference between bulk and thin film, the optical, electrical, dielectric and magnetic properties of thin film, the theories explaining the formation of thin film and the fabrication and advantages of thin film devices.

Course Outcomes
At the end of the course students will be able to
CO1. To understand the principle, differences and similarities, advantages, and disadvantages of different thin film deposition Techniques.
CO2. To understand and evaluate and use models for understanding nucleation and growth of thin films.
CO3. To understand about different instrumentation techniques and to analyze thin film properties to apply for various applications.
CO4. To improve problems solving skills related to evaluation of different properties of thin films.

CO-PO Mapping

Text books

1. K.L. Chopra, “Thin Film Phenomena”, First Edition, McGraw-Hill, 1969.
2. George Hass, “Physics of Thin Films”, Volumes 1, Academic Press Inc., 1963.

References

1. K. L. Chopra and S. R. Das, “Thin Film Solar Cells”, Springer, 1983.
2. L. I. Maissel and Glang, “Handbook of Thin Film Technology”, McGraw Hill Higher Education, 1970.
3. J. C. Anderson, “The Use of Thin Films in Physical Investigation”, Academic Press Inc., 1966.
4. J. J. Coutts, “Active and Passive Thin Film Devices”, Academic Press Inc., 1978.
5. R.W. Berry, P.M. Hall and M.T. Harris, “Thin Film Technology”, Van Nostrand, 1968.

*CA – Can be Quizzes, Assignments, Projects, and Reports.

Justification for CO-PO Mapping