Publication Type : Conference Paper
Publisher : Electron Devices Meeting, 2002. IEDM'02. International, IEEE
Source : Electron Devices Meeting, 2002. IEDM'02. International, IEEE (2002)
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2002
Abstract :
Cite this Research Publication : R. Choi, Onishi, K., Kang, C. Seok, Dr. Sundararaman Gopalan, Nieh, R., Kim, Y. H., Han, J. H., Krishnan, S., Cho, H. - J., Shahriar, A., and , “Fabrication of high quality ultra-thin HfO/sub 2/gate dielectric MOSFETs using deuterium anneal”, in Electron Devices Meeting, 2002. IEDM'02. International, 2002.