Publication Type : Conference Paper
Publisher : International Electron Devices Meeting,
Source : International Electron Devices Meeting, 1998.
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 1998
Abstract :
Cite this Research Publication : H. - J. Cho, Kang, C. S., Onishi, K., Dr. Sundararaman Gopalan, Nieh, R., Choi, R., Dharmarajan, E., and Lee, J. C., “Novel Nitrogen Profile Engineering for Improved TaN/HfO\~ 2/Si MOSFET Performance”, in International Electron Devices Meeting, 1998.