Publication Type : Conference Paper
Publisher : International Workshop on the Physics of Semiconductor Devices 2015 (IWPSD-15)
Source : International Workshop on the Physics of Semiconductor Devices 2015 (IWPSD-15), Bangalore, 2015.
Campus : Amritapuri
School : School of Engineering
Department : Electronics and Communication
Year : 2015
Abstract :
Cite this Research Publication : Viswas Sadasivan and Utpal Das, “Fabrication of InGaAsP/InP nano-photonic ridge waveguides using CH4+H2 ICP RIE and Al lift-off mask”, in International Workshop on the Physics of Semiconductor Devices 2015 (IWPSD-15), Bangalore, 2015.