Publication Type : Conference Proceedings
Publisher : American Vacuum Society
Source : International Conference on Atomic Layer Deposition, American Vacuum Society (2011)
Campus : Coimbatore
School : School of Engineering
Department : Chemical
Year : 2011
Abstract : L. Yang, Weber, U., Baumann, P. K., Mack, J., Karim, Z., Dr. Sasangan Ramanathan, and Lu, B., “Atomic Layer Deposition of Smooth Phase Change GexSbyTez Layers on Planar and 3D Structures”, International Conference on Atomic Layer Deposition, American Vacuum Society. 2011.
Cite this Research Publication : L. Yang, Weber, U., Baumann, P. K., Mack, J., Karim, Z., Dr. Sasangan Ramanathan, and Lu, B., “Atomic Layer Deposition of Smooth Phase Change GexSbyTez Layers on Planar and 3D Structures”, International Conference on Atomic Layer Deposition, American Vacuum Society. 2011.